Paper Title
Neural Sliding-Mode Tracking Control of a Precision Stage

Abstract
This study developed an adaptive neural sliding-mode tracking controller for a precision stage. This controller combines sliding-mode controller and an adaptive neural network uncertainties and disturbance estimator. The performance of the proposed controller also compared with the integral sliding-mode controller with disturbance estimation scheme that has been reported recently. The experimental results show that the proposed controller can improve the tracking performance of the system one step further. Keywords: Adaptive neural network, sliding-mode controller, tracking control, precision stage